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Near-Field-Scanning-Optical-Microscopy
(NSOM) System
Our deep UV femtosecond laser is also integrated with a UV NSOM/AFM system
for imaging optical patterns with a spatial resoultion of 100 nm. The NSOM/AFM
system is also capable of imaging non-destructively semiconductor film
resistivity, capacitance, and defects with a 100 nm spacial resolution.
Below: near field microscope
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