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E-Beam Evaporator


(Professor Sixuan Jin and Dr. Tom Oder record results)

    The E-beam Evaporator (pictured above) is the primary system we use to deposit contacts and thin films.  The materials we deposit range from metals (e.g. Au, Ni, Ti, and Al) to insulators (e.g. SiO2, Si3N4) which are necessary for device fabrication.  The evaporation is carried out at a pressure of about 5 X 10 -7 torr and the system is equipped with a film thickness monitor. 
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